DOUBLE BEAM LASER INTERFEROMETER
aixdbli
The Double Beam Laser Interferometer (aixDBLI) for the measurement of d33 offers a proven accuracy (x-cut quartz) up to 0.2 pm/V. The main feature of the system is the ultra fast acquisition time of a few seconds for a single measurement.
Based on a new data acquisition algorithm, the measurement speed is enhanced by a factor of 100. This enables for the first time the comparison of electrical and mechanical data for thin films recorded at the same excitation frequency. Due to the the differential measurement principle the influence of sample bending is eliminated, which is the major obstacle using atomic force microscopes (AFM) for these types of measurements. |
SPECIFICATIONS
Resolution 1 pm tested by x-cut Quartz Displacement/Strain Measurement 50 Hz - 5 kHz 100 mV to 10 V up to 25 V (optional) Piezoelectric d33 coefficient Bias voltage (1 mHz to 1 Hz) 100 mV to 10 V up to 25 V (optional) Small signal (1 kHz to 10 kHz) 100 mV to 10 V |
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*Pictures shown above are for reference only. Actual product may differ slightly.
**Some products may not be available in all countries. Please contact us for further information and clarification. |
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